Accession Number:

AD0777849

Title:

A Scanning Auger Microscope for Thin Film Analysis.

Descriptive Note:

Master's thesis,

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING

Personal Author(s):

Report Date:

1973-12-01

Pagination or Media Count:

74.0

Abstract:

A scanning Auger microscope was assembled by a previous Air Force Institute of Technology student at the Air Force Avionics Laboratory for spectroscopic analysis of thin films. Previous attempts to operate the system for Auger analysis were incomplete. Modifications were made to the system so Auger analysis could be made on a fixed point. Sputtering facilities were designed and added to the system to provide cleaning and indepth profile capabilities. Problems encountered in obtaining a surface scanned Auger peak presentation were identified and correlated with the overall present sensitivity of the system. Author

Subject Categories:

  • Ceramics, Refractories and Glass
  • Metallurgy and Metallography
  • Atomic and Molecular Physics and Spectroscopy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE