Accession Number:

AD0775919

Title:

Semiconductor Measurement Technology.

Descriptive Note:

Quarterly rept. 1 Jul-30 Sep 73,

Corporate Author:

NATIONAL BUREAU OF STANDARDS WASHINGTON DC ELECTRONIC TECHNOLOGY DIV

Personal Author(s):

Report Date:

1974-03-01

Pagination or Media Count:

69.0

Abstract:

Contents Resistivity dopant profiles, crystal defects and contaminants, insulator films, test patterns, photolithography, metallization, wafer inspection and test, die attachment, interconnection bonding, hermeticity, microwave diodes, high-frequency measurements.

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE