Semiconductor Measurement Technology.
Quarterly rept. 1 Jul-30 Sep 73,
NATIONAL BUREAU OF STANDARDS WASHINGTON DC ELECTRONIC TECHNOLOGY DIV
Pagination or Media Count:
Contents Resistivity dopant profiles, crystal defects and contaminants, insulator films, test patterns, photolithography, metallization, wafer inspection and test, die attachment, interconnection bonding, hermeticity, microwave diodes, high-frequency measurements.
- Electrical and Electronic Equipment
- Fabrication Metallurgy
- Solid State Physics