Method for Automatic Control of the Process of Zone Melting without a Crucible,
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
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The invention pertains to a process of obtaining semiconductor materials. The purpose of the invention is to increase the accuracy of controlling the process of zone melting without a crucible. This is achieved by projecting the profile of the zone located directly at the crystallization front onto a photocell photodetector which controls the ingot diameter via a servosystem beyond the crystallization front.
- Manufacturing and Industrial Engineering and Control of Production Systems