Charge Trapping Effects in Thin Films of Al2O3 and SiO2.
PRINCETON UNIV N J SOLID STATE AND MATERIALS LAB
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Electron and hole traps in MIS devices with pyrohydrolytic Al2O3 gate insulator have been investigated, using the MIS device as an integral detector of the charge stored in the oxide. The same detection technique has been used to investigate ionizing radiation-induced charge trapping effects in thin films of SiO2 incorporated into MIS capacitor structures. Modified author abstract
- Solid State Physics