Accession Number:

AD0768422

Title:

Multistage Turbomolecular Vacuum Pump,

Descriptive Note:

Corporate Author:

FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Report Date:

1973-10-09

Pagination or Media Count:

6.0

Abstract:

The patent describes a multistage vacuum turbomolecular pump which consists of a housing containing rotor and stator disks having working elements blades, radial slots along their periphery. To increase the compression stage and reducing the reverse flow of evacuated gas, the disk are made with a channel section which decreases in the direction of pumping from the maximum possible size in the first stage to a minimum, which approaches zero in the last stage.

Descriptors:

Subject Categories:

  • Pumps, Filters, Pipes, Tubing, Fittings and Valves

Distribution Statement:

APPROVED FOR PUBLIC RELEASE