Multistage Turbomolecular Vacuum Pump,
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
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The patent describes a multistage vacuum turbomolecular pump which consists of a housing containing rotor and stator disks having working elements blades, radial slots along their periphery. To increase the compression stage and reducing the reverse flow of evacuated gas, the disk are made with a channel section which decreases in the direction of pumping from the maximum possible size in the first stage to a minimum, which approaches zero in the last stage.
- Pumps, Filters, Pipes, Tubing, Fittings and Valves