Multistage Vacuum Molecular Pump,
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
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The patent describes a multistage vacuum molecular pump consisting of rotor and stator elements with spiral channels placed in the housing on their working surfaces. To increase the pumping rate and the compression stage, the pumps are made in sections and the profiles of each of the sections are identical while the adjoining sections of the channel are made with a width-depth ratio which decreases in the direction of the pumping in the last stage, the channels in the adjoining sections are made with the helix angle relative to the velocity vector plane of the rotor elements which decreases in the direction of pumping.
- Pumps, Filters, Pipes, Tubing, Fittings and Valves