Accession Number:

AD0767287

Title:

Fundamental Studies of Semiconductor Heteroepitaxy

Descriptive Note:

Final rept. (Part 1), Jun 1970-30 Jun 1973

Corporate Author:

ROCKWELL INTERNATIONAL ANAHEIM CA ELECTRONICS OPERATIONS

Report Date:

1973-08-01

Pagination or Media Count:

272.0

Abstract:

Contents Theory of epitaxy and heteroepitaxial interfaces Deposition studies and film preparation Analysis and purification of chemical vapor deposition CVD reactants Chemistry and reaction kinetics of CVD processes Preparation and characterization of substrates Al2O3 characterization by carrier injection and transport measurements.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Crystallography
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE