Fundamental Studies of Semiconductor Heteroepitaxy
Final rept. (Part 1), Jun 1970-30 Jun 1973
ROCKWELL INTERNATIONAL ANAHEIM CA ELECTRONICS OPERATIONS
Pagination or Media Count:
Contents Theory of epitaxy and heteroepitaxial interfaces Deposition studies and film preparation Analysis and purification of chemical vapor deposition CVD reactants Chemistry and reaction kinetics of CVD processes Preparation and characterization of substrates Al2O3 characterization by carrier injection and transport measurements.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems
- Solid State Physics