Scanning Ellipsometry as a Tool for the Characterization of Absorbing Surface Films.
CASE WESTERN RESERVE UNIV CLEVELAND OHIO ELECTROCHEMISTRY RESEARCH LAB
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The general theory of reflection and of ellipsometry is reviewed. The new technique of scanning ellipsometry, which allows a conventional ellipsometer to be used to follow film growth dynamically, is described. A program is given which allows the characterization of an absorbing surface film i.e., determination of its complex refractive index and thickness from measured changes in the ellipsometric parameters Delta sub 0 and Psi sub 0 and in the relative reflectivity. The method is illustrated by an examination of the electrochemical formation of the anodic oxide film on platinum. Author
- Physical Chemistry