Accession Number:

AD0766820

Title:

Scanning Ellipsometry as a Tool for the Characterization of Absorbing Surface Films.

Descriptive Note:

Technical rept.,

Corporate Author:

CASE WESTERN RESERVE UNIV CLEVELAND OHIO ELECTROCHEMISTRY RESEARCH LAB

Personal Author(s):

Report Date:

1973-06-01

Pagination or Media Count:

82.0

Abstract:

The general theory of reflection and of ellipsometry is reviewed. The new technique of scanning ellipsometry, which allows a conventional ellipsometer to be used to follow film growth dynamically, is described. A program is given which allows the characterization of an absorbing surface film i.e., determination of its complex refractive index and thickness from measured changes in the ellipsometric parameters Delta sub 0 and Psi sub 0 and in the relative reflectivity. The method is illustrated by an examination of the electrochemical formation of the anodic oxide film on platinum. Author

Subject Categories:

  • Physical Chemistry

Distribution Statement:

APPROVED FOR PUBLIC RELEASE