Accession Number:

AD0763600

Title:

Sputtering (Industrial Process).

Descriptive Note:

Bibliography Mar 55-Nov 72.

Corporate Author:

DEFENSE DOCUMENTATION CENTER ALEXANDRIA VA

Personal Author(s):

Report Date:

1973-07-01

Pagination or Media Count:

217.0

Abstract:

The bibliography contains citations of unclassified and unlimited reports on Sputtering as used in industrial processes dealing with techniques and applications of coatings and films. Discussed are metal films, integrated circuits, thin films, capacitors, resistors and transistors. Author

Descriptors:

• (*SPUTTERING
• *BIBLIOGRAPHIES)
• (*METAL FILMS
• SPUTTERING)
• COATINGS
• FILMS
• DIELECTRIC FILMS
• CAPACITORS
• RESISTORS
• TRANSISTORS
• SEMICONDUCTOR DEVICES
• SEMICONDUCTING FILMS
• MICROELECTRONICS
• INTEGRATED CIRCUITS

Subject Categories:

• Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE