Accession Number:

AD0762813

Title:

Sputtering of Multicomponent Materials by Ion Bombardment.

Descriptive Note:

Final rept. Mar 69-28 Feb 73,

Corporate Author:

MINNESOTA UNIV MINNEAPOLIS PHYSICAL ELECTRONICS LAB

Personal Author(s):

Report Date:

1973-06-01

Pagination or Media Count:

16.0

Abstract:

Papers which resulted from the research are Cone Formation on Metal Targets during Sputtering Alloy Sputtering Studies with in situ Auger Electron Spectroscopy Auger Electron Spectroscopy Studies of Sputter Deposition and Sputter Removal of Mo from Various Metal Surfaces Escape Length of Auger Electrons and Purple Plague and Au-Al Diffusion Studies with Auger Electron Spectroscopy. Modified author abstract

Subject Categories:

  • Coatings, Colorants and Finishes
  • Fabrication Metallurgy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE