Accession Number:

AD0761625

Title:

Novel Surface Acoustic Wave Transducer Techniques

Descriptive Note:

Final rept.

Corporate Author:

STANFORD RESEARCH INST MENLO PARK CA

Report Date:

1973-04-01

Pagination or Media Count:

66.0

Abstract:

The research demonstrates that a new electron-beam image projection exposure technique, the slit-lens, can be applied to the fabrication of high resolution interdigital patterns for use as high frequency surface acoustic wave transducers. Further research efforts include the development of the ancillary thin-film techniques for making metallic patterns on piezoelectric substrates, and the design, fabrication, and electrical test of actual surface acoustic wave delay lines produced by the foregoing techniques.

Subject Categories:

  • Line, Surface and Bulk Acoustic Wave Devices
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE