Novel Surface Acoustic Wave Transducer Techniques
STANFORD RESEARCH INST MENLO PARK CA
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The research demonstrates that a new electron-beam image projection exposure technique, the slit-lens, can be applied to the fabrication of high resolution interdigital patterns for use as high frequency surface acoustic wave transducers. Further research efforts include the development of the ancillary thin-film techniques for making metallic patterns on piezoelectric substrates, and the design, fabrication, and electrical test of actual surface acoustic wave delay lines produced by the foregoing techniques.
- Line, Surface and Bulk Acoustic Wave Devices
- Manufacturing and Industrial Engineering and Control of Production Systems