Accession Number:

AD0760715

Title:

Sputtered Thin Film Research

Descriptive Note:

Semi-annual technical rept. no. 2, 16 Oct 1972-15 Apr 1973

Corporate Author:

UNITED AIRCRAFT RESEARCH LABS EAST HARTFORD CT

Personal Author(s):

• Shuskus, Alexander J.
• Quinn, Daniel J.
• Paradis, Edouard L.
• Berak, James M.
• Reeder, Thomas M.

Report Date:

1973-05-27

Pagination or Media Count:

62.0

Abstract:

Current progress toward establishing the feasibility of reactive rf sputtering as a means of preparing single crystal films suitable for integrated optics and electronics applications is discussed. Single crystal films of aluminum nitride, zinc oxide, rutile and gallium arsenide have been successfully grown by this technique. Epitaxy of aluminum nitride and zinc oxide has been obtained on 0001 and 1,-1,0,2 sapphire substrates, rutile on 1,-1,0,2 sapphire and gallium arsenide on semi-insulating substrates of gallium arsenide. Surface acoustic wave delay lines were fabricated to evaluate the piezoelectric qualities of the zinc oxide and aluminum nitride films. The piezoelectric coupling coefficients determined indicate that the quality of the sputtered films is comparable to the best results reported for films prepared by chemical vapor deposition.

Descriptors:

• *DIELECTRIC FILMS
• *SEMICONDUCTING FILMS
• *SPUTTERING
• ALUMINUM COMPOUNDS
• DELAY LINES
• EPITAXIAL GROWTH
• GALLIUM ARSENIDES
• NITRIDES
• OXIDES
• PIEZOELECTRIC EFFECT
• RUTILE
• SAPPHIRE
• SEMICONDUCTOR DEVICES
• SINGLE CRYSTALS
• SUBSTRATES
• ZINC COMPOUNDS

Subject Categories:

• Line, Surface and Bulk Acoustic Wave Devices
• Acoustooptic and Optoacoustic Devices
• Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE