The Use of Scanning Auger Spectroscopy for Surface Analysis.
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING
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A scanning Auger microscope was constructed at the Air Force Avionics Laboratory to permit surface analysis of solid state devices. The instrument was operated in a scanning electron microscope mode for initial tests and calibration. Electron gun operation was verified by measuring a beam current of 0.8 microampere. Electron beam diameter was determined to be approximately 20 microns by observing the resolution of the display. A cylindrical mirror analyzer was installed on the electron gun assembly and synchronous detection techniques were used to record Auger spectra. An apparent inability to record Auger peaks was localized to the analyzer. Wiring diagrams and operating instructions were formulated for the use of future operators of the apparatus. Author
- Electrical and Electronic Equipment
- Test Facilities, Equipment and Methods
- Solid State Physics