Accession Number:

AD0759257

Title:

X-ray Lithography: A New High Resolution Replication Process.

Descriptive Note:

Journal article,

Corporate Author:

MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB

Personal Author(s):

Report Date:

1972-03-14

Pagination or Media Count:

24.0

Abstract:

A newly developed x-ray lithographic process is described and its prospects for making sub-micron resolution pattern definition a common practice are assessed. Author

Subject Categories:

  • Line, Surface and Bulk Acoustic Wave Devices
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE