Fabrication of Elastic Surface Devices by Chemical Etching.
Physical sciences research papers,
AIR FORCE CAMBRIDGE RESEARCH LABS L G HANSCOM FIELD MASS
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The fabrication of elastic surface-wave encoders and decoders for use in secure, antijam command, control, and communications systems is described. The processes consist of substrate cleaning, vacuum evaporation of thin aluminum films, photolithography, and chemical etching. Using these techniques, surface-wave interdigital transducer gratings have been fabricated with linewidths as small as 1.5 micrometer. A discussion of the factors affecting the yield of these devices is included. Author
- Line, Surface and Bulk Acoustic Wave Devices
- Manufacturing and Industrial Engineering and Control of Production Systems