Scanning-Electron-Microscopy of Dielectrics,
DEFENCE RESEARCH INFORMATION CENTRE ORPINGTON (ENGLAND)
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When examining samples of low conductivity with a scanning electron microscope REM charging of the body and surface takes place. This is brought about by the electrons of the probe. In the majority of cases this leads to a deterioration in the resolution and to a considerable distortion of the image. In order to prevent charging, several methods are discussed.
- Test Facilities, Equipment and Methods