Accession Number:

AD0754912

Title:

Scanning-Electron-Microscopy of Dielectrics,

Descriptive Note:

Corporate Author:

DEFENCE RESEARCH INFORMATION CENTRE ORPINGTON (ENGLAND)

Personal Author(s):

Report Date:

1972-11-01

Pagination or Media Count:

9.0

Abstract:

When examining samples of low conductivity with a scanning electron microscope REM charging of the body and surface takes place. This is brought about by the electrons of the probe. In the majority of cases this leads to a deterioration in the resolution and to a considerable distortion of the image. In order to prevent charging, several methods are discussed.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE