Accession Number:
AD0754912
Title:
Scanning-Electron-Microscopy of Dielectrics,
Descriptive Note:
Corporate Author:
DEFENCE RESEARCH INFORMATION CENTRE ORPINGTON (ENGLAND)
Personal Author(s):
Report Date:
1972-11-01
Pagination or Media Count:
9.0
Abstract:
When examining samples of low conductivity with a scanning electron microscope REM charging of the body and surface takes place. This is brought about by the electrons of the probe. In the majority of cases this leads to a deterioration in the resolution and to a considerable distortion of the image. In order to prevent charging, several methods are discussed.
Descriptors:
Subject Categories:
- Test Facilities, Equipment and Methods
- Optics