Accession Number:

AD0754875

Title:

Ellipsometric Study of a Thin Transparent Film Overlaid on a Transparent Substrate Having a Surface Layer,

Descriptive Note:

Corporate Author:

TOKAI UNIV HIRATSUKA (JAPAN) DEPT OF ELECTRO-PHOTO-OPTICS ENGINEERI

Personal Author(s):

• Yokota,H.
• Nishibori,M.
• Kinosita,K.

Report Date:

1969-01-01

Pagination or Media Count:

13.0

Abstract:

The presence of a very thin surface layer in the substrate surface may have a serious influence on the ellipsometric determination of the refractive index nf and thickness df of a film overlaid on a substrate of known index nb. The surface layer is regarded as a homogeneous film of index ns, and delta and tan psi are calculated for the system nf,dfns, ds on substrate nb.

Descriptors:

• (*FILMS
• REFLECTIVITY)
• REFRACTIVE INDEX
• THICKNESS
• SURFACES
• SUBSTRATES
• JAPAN

Subject Categories:

• Test Facilities, Equipment and Methods
• Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE