Ellipsometric Study of a Thin Transparent Film Overlaid on a Transparent Substrate Having a Surface Layer,
TOKAI UNIV HIRATSUKA (JAPAN) DEPT OF ELECTRO-PHOTO-OPTICS ENGINEERI
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The presence of a very thin surface layer in the substrate surface may have a serious influence on the ellipsometric determination of the refractive index nf and thickness df of a film overlaid on a substrate of known index nb. The surface layer is regarded as a homogeneous film of index ns, and delta and tan psi are calculated for the system nf,dfns, ds on substrate nb.
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