Accession Number:

AD0754871

Title:

A Double-Modulation Photoelectric Ellipsometer,

Descriptive Note:

Corporate Author:

INSTITUT D'OPTIQUE PARIS (FRANCE)

Personal Author(s):

Report Date:

1969-01-01

Pagination or Media Count:

8.0

Abstract:

The instrument uses for the first time simultaneous modulation of azimuth and phase at two different frequencies. The principle is particularly well suited for automation. It is possible to adjust at the same time azimuth and phase independently of each other. Measurements are taken with a precision of one minute of arc. The spectral range of the instrument extends from 0.22 to 2.5 micrometers. Author

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE