Nonpiezoelectric Surface Wave Correlator.
Final technical rept. 14 Sep 71-14 Jun 72,
RAYTHEON CO WALTHAM MASS RESEARCH DIV
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14 Jun 72,FHolland,Melvin G. Willingham,Charles B. Matsinger,John H. S-1487F30602-72-C-0044RADCTR-72-291delay lines, piezoelectric crystals, piezoelectric transducers, design, semiconductor devices, substrates, silicon, ultrasonic radiation, attenuation, zinc compounds, oxideszinc oxides, acoustic waves, surface waves, piezoelectric materials, semiconductors, surface waves, elastic wavesThe program was to study and characterize an acoustic surface wave, multiple-tap, delay line structure using sputtered zinc oxide ZnO overlay piezoelectric films on metal interdigital arrays, on a silicon surface. The tasks included investigation of surface acoustic wave generation techniques as well as the study of surface wave propagation on the ZnOSi surface. The structures were used to prepare a sequence generator and its reciprocal matched filter to experimentally demonstrate the generation and correlation of a biphase sequence.
- Line, Surface and Bulk Acoustic Wave Devices