Accession Number:

AD0750577

Title:

Materials and Interface Factors Limiting LSI (Large Scale Integrated Circuits) Performance and Reliability.

Descriptive Note:

Interim rept.,

Corporate Author:

HUGHES AIRCRAFT CO CULVER CITY CALIF ELECTRONIC PROPERTIES INFORMATION CENTER

Report Date:

1972-08-01

Pagination or Media Count:

45.0

Abstract:

Material, chemical, physical, metallurgical and electrical effects in large scale integreated circuits LSI and other semiconductor devices are surveyed. Material transport phenomena, thermochemical and electrochemical effects, properties of metallization systems for semiconductor devices and semiconductor surface effects as they affect device performance and reliability are discussed. Eighty-nine references are provided. Author

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE