Materials and Interface Factors Limiting LSI (Large Scale Integrated Circuits) Performance and Reliability.
HUGHES AIRCRAFT CO CULVER CITY CALIF ELECTRONIC PROPERTIES INFORMATION CENTER
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Material, chemical, physical, metallurgical and electrical effects in large scale integreated circuits LSI and other semiconductor devices are surveyed. Material transport phenomena, thermochemical and electrochemical effects, properties of metallization systems for semiconductor devices and semiconductor surface effects as they affect device performance and reliability are discussed. Eighty-nine references are provided. Author
- Electrical and Electronic Equipment