Accession Number:

AD0749610

Title:

Some Problems in Decreasing the Effect of Dust in the Production of Semiconductor Products,

Descriptive Note:

Corporate Author:

FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Personal Author(s):

Report Date:

1972-08-01

Pagination or Media Count:

9.0

Abstract:

The effect of one component of the microclimate, namely dust, on the quality of semiconductor products is discussed in this article. Tests are conducted for the purpose of finding dominant sources of dust and the effectiveness of air filters. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE