Accession Number:

AD0744946

Title:

Methods of Measurement for Semiconductor Materials, Process Control, and Devices.

Descriptive Note:

Quarterly rept. 1 Oct-31 Dec 71,

Corporate Author:

NATIONAL BUREAU OF STANDARDS WASHINGTON D C ELECTRONIC TECHNOLOGY DIV

Personal Author(s):

• Bullis,W. Murray

Report Date:

1972-06-01

Pagination or Media Count:

81.0

Abstract:

The quarterly progress report, fourteenth of a series, describes NBS activities directed toward the development of methods of measurement for semiconductor materials, process control, and devices. Work is continuing on measurement of resistivity of semiconductor crystals study of gold-doped silicon development of the infrared response technique evaluation of wire bonds and die attachment measurement of thermal properties of semiconductor devices, delay time and related carrier transport properties in junction devices, and noise properties of microwave diodes and characterization of silicon nuclear radiation detectors. Supplementary data concerning staff, standards committee activities, technical services, and publications are included as appendixes. Author

Descriptors:

• *QUALITY CONTROL
• TEST METHODS
• THERMAL PROPERTIES
• CHARGE CARRIERS
• MICROWAVE EQUIPMENT
• ELECTRICAL RESISTANCE
• SILICON
• GERMANIUM
• PHOTOELECTRIC EFFECT
• BONDED JOINTS
• GAMMA COUNTERS

Subject Categories:

• Electrical and Electronic Equipment
• Fabrication Metallurgy
• Test Facilities, Equipment and Methods
• Nuclear Instrumentation
• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE