Electron Beam Fabrication of High Frequency, Low Loss, Wide Band-Width Interdigital Acoustic Surface Wave Transducers.
Final rept. 1 Sep 69-29 Feb 72,
IBM WATSON RESEARCH CENTER YORKTOWN HEIGHTS N Y
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Electron beam fabrication techniques for building surface acoustic wave transducers have been developed. Descriptions of the electron beam equipment used for writing the desired patterns and also the resist and thin film techniques used to produce the metal structures have already been reported in a previous report February 1971. This shorter final report contains additional information on the fabrication techniques, and also a description of a digital pattern generator for transducer patterns. A complete list of devices made during the contract is included. Author
- Line, Surface and Bulk Acoustic Wave Devices
- Manufacturing and Industrial Engineering and Control of Production Systems