Accession Number:

AD0744092

Title:

Electron Beam Fabrication of High Frequency, Low Loss, Wide Band-Width Interdigital Acoustic Surface Wave Transducers.

Descriptive Note:

Final rept. 1 Sep 69-29 Feb 72,

Corporate Author:

IBM WATSON RESEARCH CENTER YORKTOWN HEIGHTS N Y

Personal Author(s):

• Broers,Alec N.
• Hatzakis,Michael

Report Date:

1972-04-01

Pagination or Media Count:

18.0

Abstract:

Electron beam fabrication techniques for building surface acoustic wave transducers have been developed. Descriptions of the electron beam equipment used for writing the desired patterns and also the resist and thin film techniques used to produce the metal structures have already been reported in a previous report February 1971. This shorter final report contains additional information on the fabrication techniques, and also a description of a digital pattern generator for transducer patterns. A complete list of devices made during the contract is included. Author

Descriptors:

• (*TRANSDUCERS
• MANUFACTURING)
• ELECTRON BEAMS
• CLEANING

Subject Categories:

• Line, Surface and Bulk Acoustic Wave Devices
• Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE