Piezoelectric-Piezoresistive Coupled Strain Transducer.
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING
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The study explores the possibility of using a complementary coupling of the piezoresistive and piezoelectric effects to produce a very sensitive strain transducer. The piezoresistive effect of Si is combined with the piezoelectric effect of a ZnO thin-film in a new type of strain sensor, called the PZER. The polarization field of the ZnO activation layer changes the carrier density in the piezoresistive element. The PZER has up to 280 of the strain sensitivity of a normal piezoresistive strain transducer. The theory, fabrication, and evaluation of the PZERs is thoroughly discussed. Author
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