Accession Number:

AD0743318

Title:

Piezoelectric-Piezoresistive Coupled Strain Transducer.

Descriptive Note:

Master's thesis,

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING

Personal Author(s):

Report Date:

1972-03-01

Pagination or Media Count:

105.0

Abstract:

The study explores the possibility of using a complementary coupling of the piezoresistive and piezoelectric effects to produce a very sensitive strain transducer. The piezoresistive effect of Si is combined with the piezoelectric effect of a ZnO thin-film in a new type of strain sensor, called the PZER. The polarization field of the ZnO activation layer changes the carrier density in the piezoresistive element. The PZER has up to 280 of the strain sensitivity of a normal piezoresistive strain transducer. The theory, fabrication, and evaluation of the PZERs is thoroughly discussed. Author

Subject Categories:

  • Test Facilities, Equipment and Methods

Distribution Statement:

APPROVED FOR PUBLIC RELEASE