Fabrication of the Video Prototype Machine.
Technical rept. 28 May 70-31 Aug 71,
RESEARCH TRIANGLE INST DURHAM N C
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The report describes the design, fabrication, and preliminary evaluation of a test set to be used for visual inspection of integrated circuits ICs on the production line. Laser illumination and spatial frequency filtering are incorporated in the test set. The test set operator is thereby presented with an IC image in which defects on the IC surface are enhanced made clearly visible and the detailed circuit pattern is suppressed. The IC image is magnified by 50 to 200 times and displayed on a high resolution closed circuit television monitor. Both spatially filtered and unfiltered images are available. Author
- Electrical and Electronic Equipment