Single Source Techniques for the Evaporation of Alloy Films. Steady State Evaporation of InSb Alloys.
Annual rept. no. 1 Apr 66-Oct 67,
KANSAS STATE UNIV MANHATTAN DEPT OF PHYSICS
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A procedure is described that allows the evaporation, from a single source containing starting mixture or alloy of given composition, a vapor mixture having the same compositon as the starting mixture. The procedure is referred to as steady-state evaporation. The theory of steady-state evaporation is presented for several sets of source conditions, and some numerical examples are given. Details of the experimental evaluation of the procedure are given. InSb is used as a test material because of the high vapor-pressure ratio of the components. Techniques for the analysis of films by x-ray fluorescence are described.
- Fabrication Metallurgy