Accession Number:

AD0738184

Title:

Electron Beam Fabrication of High Frequency, Low Loss, Wide Band-Width Interdigital Acoustic Surface Wave Transducers.

Descriptive Note:

Interim rept.,

Corporate Author:

IBM WATSON RESEARCH CENTER YORKTOWN HEIGHTS N Y

Personal Author(s):

Report Date:

1971-02-16

Pagination or Media Count:

44.0

Abstract:

Electron beam fabrication techniques for the building of surface acoustic wave transducers are described. The report contains descriptions of the electron beam equipment used for writing the desired patterns and also the resist and thin film techniques used to produce the metal structures. A list of devices built to the time of the report is included. Author

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Test Facilities, Equipment and Methods

Distribution Statement:

APPROVED FOR PUBLIC RELEASE