Electron Beam Fabrication of High Frequency, Low Loss, Wide Band-Width Interdigital Acoustic Surface Wave Transducers.
IBM WATSON RESEARCH CENTER YORKTOWN HEIGHTS N Y
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Electron beam fabrication techniques for the building of surface acoustic wave transducers are described. The report contains descriptions of the electron beam equipment used for writing the desired patterns and also the resist and thin film techniques used to produce the metal structures. A list of devices built to the time of the report is included. Author
- Manufacturing and Industrial Engineering and Control of Production Systems
- Test Facilities, Equipment and Methods