Accession Number:

AD0733189

Title:

A Technique for Directly Plotting the Doping Profile of Semiconductor Wafers,

Descriptive Note:

Corporate Author:

TORONTO UNIV (ONTARIO) DEPT OF ELECTRICAL ENGINEERING

Personal Author(s):

• Salama,C. A. T.
• Holmes,F.

Report Date:

1970-07-24

Pagination or Media Count:

6.0

Abstract:

The note describes a simple method of automating the differential capacitance technique using an analog system which provides a direct plot of the doping profile. The technique described can be used in conjunction with a Schottky diode, an abrupt pn junction diode or an MIS capacitor. Author

Descriptors:

• DOPING
• SEMICONDUCTOR DIODES
• CAPACITORS
• ANALOG SYSTEMS
• TEST EQUIPMENT
• TEST METHODS

Subject Categories:

• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE