Accession Number:

AD0731796

Title:

Failure Mechanism Studies on Multilevel Metallization Systems for LSI.

Descriptive Note:

Final rept. 20May 70-19 May 71,

Corporate Author:

TEXAS INSTRUMENTS INC DALLAS SEMICONDUCTOR RESEARCH AND DEVELOPMENT LAB

Personal Author(s):

Report Date:

1971-09-01

Pagination or Media Count:

100.0

Abstract:

The objective of this investigation was the determination of quantitative information about the mechanisms of failure associated with aluminum-silicon dioxide-aluminum two-layer interconnection systems used on large scale integrated circuits. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE