Accession Number:
AD0730332
Title:
Sputtered Zinc Sulphide Films on Silicon,
Descriptive Note:
Corporate Author:
SIGNALS RESEARCH AND DEVELOPMENT ESTABLISHMENT CHRISTCHURCH (ENGLAND)
Personal Author(s):
Report Date:
1971-03-01
Pagination or Media Count:
13.0
Abstract:
The design of a triode RF sputtering system for the deposit of high purity films of Zinc Sulphide is outlined. It is shown that the deposited films have a high degree of purity and are highly oriented crystallographically. Author
Descriptors:
Subject Categories:
- Manufacturing and Industrial Engineering and Control of Production Systems
- Solid State Physics