Accession Number:

AD0730332

Title:

Sputtered Zinc Sulphide Films on Silicon,

Descriptive Note:

Corporate Author:

SIGNALS RESEARCH AND DEVELOPMENT ESTABLISHMENT CHRISTCHURCH (ENGLAND)

Personal Author(s):

Report Date:

1971-03-01

Pagination or Media Count:

13.0

Abstract:

The design of a triode RF sputtering system for the deposit of high purity films of Zinc Sulphide is outlined. It is shown that the deposited films have a high degree of purity and are highly oriented crystallographically. Author

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE