Accession Number:

AD0729543

Title:

RF Sputtering of Zinc Sulphide,

Descriptive Note:

Corporate Author:

SIGNALS RESEARCH AND DEVELOPMENT ESTABLISHMENT CHRISTCHURCH (ENGLAND)

Personal Author(s):

Report Date:

1970-06-01

Pagination or Media Count:

32.0

Abstract:

The report describes the work that was done for a period of eight months on the RF sputtering of zinc sulphide doped thin films on to silicon. Details of the sputtering process and an assessment of equipment improvements are included. Author

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE