Difficultes Inherentes a L'Emploi de Sondes Electrostatiques dans un Plasma R.F. (Difficulties Inherent in the Use of Electrostatic Probes in a Radiofrequency Excited Plasma),
DEFENCE RESEARCH ESTABLISHMENT VALCARTIER QUEBEC
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The behaviour of electrostatic probes in a radiofrequency-excited plasma has been studied. The present data illustrate the perturbing effect of a R.F. potential drop at the plasma-probe junction, on the I-V characteristics of the probe. An increase of the probe ion current is observed, and the electron temperatures deduced from such characteristics are too high by a factor ranging from 2 to 3. Improvements of the probe and its associated circuit minimize the R.F. potential drop at the plasma-probe junction. This permits valid I-V characteristics to be obtained, as shown by experimental results.
- Plasma Physics and Magnetohydrodynamics