LOW TEMPERATURE SILICON THERMOMETER AND BOLOMETER.
STANFORD UNIV CALIF MICROWAVE LAB
Pagination or Media Count:
By simple diffusion and etching procedures low temperature sensitive surface layers can be prepared on otherwise insulating silicon substrates. Temperature coefficients of the resistance of these layers of the order of unity can be obtained at any temperatures below 20K. The usefulness of the silicon device as a low temperature thermometer and bolometer is demonstrated. Author
- Test Facilities, Equipment and Methods