Accession Number:

AD0711938

Title:

CLEAN ROOM FOR MICRO-MINIATURIZATION PHOTOGRAPHIC FACILITY.

Descriptive Note:

Technical rept.,

Corporate Author:

ARMY ELECTRONICS COMMAND FORT MONMOUTH N J

Personal Author(s):

Report Date:

1970-09-01

Pagination or Media Count:

22.0

Abstract:

The report covers the design and construction of a horizontal laminar flow clean room complex which supports the operation of a Borrowdale micro-miniaturization camera. Temperature and humidity controlled ultraclean ambient conditions were provided to assure clean and undistorted photographic masks which are used in the photolithographic process of fabricating micro-miniature circuits. All the rooms of the complex are Class 100 except for a general work space which is Class 100,000. Under clean room conditions, image reductions are only limited by the resolution of the photographic emulsions. Author

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE