CLEAN ROOM FOR MICRO-MINIATURIZATION PHOTOGRAPHIC FACILITY.
ARMY ELECTRONICS COMMAND FORT MONMOUTH N J
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The report covers the design and construction of a horizontal laminar flow clean room complex which supports the operation of a Borrowdale micro-miniaturization camera. Temperature and humidity controlled ultraclean ambient conditions were provided to assure clean and undistorted photographic masks which are used in the photolithographic process of fabricating micro-miniature circuits. All the rooms of the complex are Class 100 except for a general work space which is Class 100,000. Under clean room conditions, image reductions are only limited by the resolution of the photographic emulsions. Author
- Test Facilities, Equipment and Methods