Accession Number:

AD0701472

Title:

R. F. SPUTTERED QUARTZ DIELECTRIC CAPACITORS,

Descriptive Note:

Corporate Author:

SIGNALS RESEARCH AND DEVELOPMENT ESTABLISHMENT CHRISTCHURCH (ENGLAND)

Personal Author(s):

• Franklin,B. J.

Report Date:

1969-04-01

Pagination or Media Count:

33.0

Abstract:

Radio frequency sputtering was used to deposit quartz films for use as the dielectric in thin film capacitors. Experiments are described in which the performance of the capacitors was assessed. Capacitances up to 250 microfaradssq m were achieved with reasonably low loss tan delta approximately 0.005 at frequencies below 1 MHz. Above 1 MHz loss increased linearly with frequency. Temperature coefficients of capacitance approximately 120 ppmC were measured, and the humidity sensitivity of the devices investigated briefly. Loss mechanisms and dielectric defects are discussed, and future lines of investigation towards improvement are suggested. Author

Descriptors:

• (*QUARTZ CAPACITORS
• RELIABILITY(ELECTRONICS))
• DIELECTRIC FILMS
• SPUTTERING
• RADIOFREQUENCY
• MANUFACTURING
• GREAT BRITAIN

Subject Categories:

• Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE