HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Quarterly rept. no. 16 1 Jan-31 Mar 69,
STANFORD RESEARCH INST MENLO PARK CALIF
Pagination or Media Count:
This program is devoted to the preparation and investigation of novel electron-beam-addressable storage mosaics and to the construction of an experimental large-capacity high-speed data-storage system utilizing such mosaics. At present, emphasis is on so-called micro-cap mosaics, the elements of which are discrete, submicron-size capacitors at the bases of regular arrays of closely spaced holes in molybdenumaluminamolybdenum film sandwiches on sapphire substrates. A fine-mesh screen is used as an array of electrostatic lenses for mosaic-pattern exposure on electron-sensitive resist. Further experimental work toward the development of a vacuum etching process for the selective removal of molybdenum is covered. The results thus far indicate that ion-beam sputtering is still the most useful process for this purpose. Prior theoretical calculations of lens aberrations indicated that with a field-emitter source, adequate on-axis spot sizes should be obtained at long throw distances 17 cm. Experimental confirmation for throw distances up to about 10 cm was achieved this quarter in the brass lens system. Author
- Fabrication Metallurgy
- Computer Hardware