THIN-FILM DIELECTRICS FOR MICROELECTRONICS: A BIBLIOGRAPHY COMPILATION.
HUGHES AIRCRAFT CO CULVER CITY CALIF ELECTRONIC PROPERTIES INFORMATION CENTER
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The report was in response to a request for information on various thin-film dielectric materials used for making capacitive elements in microelectronics circuitry. Included are sections on the following Thin film capacitors general Silicon monoxide film capacitors Silicon dioxide film capacitors Silicon nitride film capacitors Tantalum oxide and other tantalate film capacitors Titanium oxide film capacitors Aluminum oxide film capacitors Hafnium oxide film capacitors Barium titanate and other titanate film capacitors Solium niobate and other niobate film capacitors Miscellaneous materials film capacitors.
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