HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Quarterly rept. no. 15, 1 Oct-31 Dec 68,
STANFORD RESEARCH INST MENLO PARK CALIF
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The program is devoted to the preparation and investigation of novel electron-beam-addressable storage mosaics and to the construction of an experimental, large-capacity, high-speed data-storage system utilizing such mosaics. At present, emphasis is on so-called micro-cap mosaics, the elements of which are discrete, submicron-size capacitors at the bases of regular arrays of closely spaced holes in molybdenumaluminamolybdenum film sandwiches on sapphire substrates. Further work is described on the use of a fine-mesh screen as an array of lenses for electron-sensitive resist exposure. First result of using 1 the screen-lens resist-exposure technique, 2 ion-beam sputtering of molybdenum, and 3 tantalum-fluoride etching of alumina in succession to form arrays of holes having the ultimate packing density are described. Author
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