VAPOR SOLID NUCLEATION: KINETICS OF FORMATION OF EPITAXIAL THIN FILMS.
BATTELLE MEMORIAL INST COLUMBUS OHIO COLUMBUS LABS
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The objective of the work was to clarify the interrelationship of competitive processes in the incidence of epitaxy in the vapor deposition system gold on molybdenum. A new contamination effect caused by oil diffusion pumps was discovered that caused an evanescent approach toward the major objective. For this reason a getter pump LEED system was constructed in order that structures formed during vapor deposition could be discerned in a contaminant free system. Author
- Physical Chemistry
- Metallurgy and Metallography