CORRECTION FACTOR TABLES FOR FOUR-POINT PROBE RESISTIVITY MEASUREMENTS ON THIN, CIRCULAR SEMICONDUCTOR SAMPLES.
NATIONAL BUREAU OF STANDARDS WASHINGTON D C
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Extensive tables of the geometrical correction factors for four-point probe resistivity measurements on thin, circular semiconductor samples with all surfaces insulating are given, 1 for an in-line probe array displaced radially with points along a diameter, 2 for an in-line probe array displaced radially with the line of points perpendicular to a diameter, and 3 for a displaced square probe array. Author
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