Accession Number:

AD0683408

Title:

CORRECTION FACTOR TABLES FOR FOUR-POINT PROBE RESISTIVITY MEASUREMENTS ON THIN, CIRCULAR SEMICONDUCTOR SAMPLES.

Descriptive Note:

Technical note,

Corporate Author:

NATIONAL BUREAU OF STANDARDS WASHINGTON D C

Personal Author(s):

Report Date:

1964-04-15

Pagination or Media Count:

43.0

Abstract:

Extensive tables of the geometrical correction factors for four-point probe resistivity measurements on thin, circular semiconductor samples with all surfaces insulating are given, 1 for an in-line probe array displaced radially with points along a diameter, 2 for an in-line probe array displaced radially with the line of points perpendicular to a diameter, and 3 for a displaced square probe array. Author

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE