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Accession Number:
AD0679560
Title:
SEMICONDUCTOR PROCESSING APPLIED TO INTEGRATED CIRCUIT FABRICATION
Descriptive Note:
Technical note
Corporate Author:
MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB
Report Date:
1968-08-26
Pagination or Media Count:
30.0
Abstract:
The note describes the processing steps and technical considerations involved in fabricating bipolar integrated circuits. Basic processes and examples of the use of these to fabricate semiconductor devices are illustrated. A bibliography of basic references to the technology and a short list of current, useful textbooks on the present state of the art are also included.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE