SEMICONDUCTOR PROCESSING APPLIED TO INTEGRATED CIRCUIT FABRICATION
MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB
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The note describes the processing steps and technical considerations involved in fabricating bipolar integrated circuits. Basic processes and examples of the use of these to fabricate semiconductor devices are illustrated. A bibliography of basic references to the technology and a short list of current, useful textbooks on the present state of the art are also included.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems