SPUTTERING OF STAINLESS STEEL WITH H (+) sub 1 IONS AND THEIR PENETRATION INTO THE SURFACE,
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
Pagination or Media Count:
The coefficient of sputtering, alpha, of stainless steel, 18N9T, with H sub 1 of 35 keV, and of penetration of the ions into the surface, eta, were detected by the method described previously loc. cit.. Not the change in the weight of the target, delta P sub t, but the change in the weight of the collector, delta P sub c, should be used in the calculation of alpha on the other hand, in the calculation of eta the sum of the two should be used alpha delta P sub c 9.3 x 10 to the minus 23 power iqt and eta delta P sub c delta P sub t1.67 x 10 to the minus 24th power iqt, where i is the current of the beam H sub 1, q is the electron charge, and t is the duration of sputtering. At pressures p or 10 to the minus 9th power mm, alpha 0.009 and eta 0.5. The effect of CO, O, CH4, CO2, and H2O was detected.
- Metallurgy and Metallography
- Manufacturing and Industrial Engineering and Control of Production Systems
- Nuclear Physics and Elementary Particle Physics