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ELECTRON ENERGIES IN ELECTRICAL DISCHARGES EXCITED AT MICROWAVE FREQUENCIES,
PURDUE UNIV LAFAYETTE IND PROJECT SQUID HEADQUARTERS
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The electron energy distribution in plasmas excited at microwave frequencies were measured by the retarding potential grid technique. The electron energy distribution and the mean electron energy in discharges of fourteen different gases are given. The electron energy range was normally 10-20 eV. Abnormally high mean electron energies 40 eV and densities were observed in plasmas of SO2 and H2S. The electron energy distribution fitted in all cases the Maxwellian energy distribution, except for discharges of SO2 and H2S which fitted approximately the form of Druyvestyn distribution. An explanation, based on the effect of negative ions on the ambipolar diffusion coefficient for the abnormalities observed in SO2 and H2S plasmas is proposed. Author
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