INVESTIGATION OF THE ENERGY SPECTRA OF ATOMS SPUTTERED FROM A TUNGSTEN SINGLE CRYSTAL BY MERCURY IONS,
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
Pagination or Media Count:
In order to clarify the cathode sputtering mechanism, the sputtering of single crystals was studied with particular attention given to a comparison of conditions required for yielding sputtered particles in various crystallographic directions.
- Physical Chemistry