AN INVESTIGATION FOR FABRICATING AND EVALUATING THE PROPERTIES OF CHEMICALLY VAPOR DEPOSITED ALUMINA AND MAGNESIA.
Interim rept. Mar 66-Mar 67,
RAYTHEON CO WALTHAM MASS RESEARCH DIV
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The chemical vapor deposition technique for aluminum oxide was investigated using the reaction 2AlCl3 3H2O yields Al2O3 6HCl. Transparent, theoretically dense, alpha-aluminum oxide was produced. If the pressure or deposition rate was increased, the product became white and opaque due to the inclusion of many small voids. If the deposition temperature was decreased or the partial pressure of water in the reaction increased, there was a tendency to co-deposit the theta modification. Both isotropic and anisotropic aluminum oxide could be produced, depending on process conditions. Two problems which presently limit the thickness of the transparent material are the rather narrow range of suitable reaction conditions and the nozzle design, which allows a product buildup on the gas inlet tube. Author
- Ceramics, Refractories and Glass
- Coatings, Colorants and Finishes