Accession Number:

AD0653628

Title:

INTEGRATED CIRCUITS FOR PORTABLE RADAR EQUIPMENT.

Descriptive Note:

Quarterly rept. no. 4, 1 Dec 66-28 Feb 67,

Corporate Author:

TEXAS INSTRUMENTS INC DALLAS SEMICONDUCTOR-COMPONENTS DIV

Personal Author(s):

• Teague,E. Clayton
• Watelski,Stacy B.
• Dennis,Charles F.
• Sharif,Louay

Report Date:

1967-06-01

Pagination or Media Count:

38.0

Abstract:

The results of experiments on factors determining the surface structure and topography of the germanium growth front during selective etch and deposition in GaAs are summarized. Experimental data have been obtained which show that preferential growth near the pocket edges can be eliminated by partially refilling the etched regions. The surface topography of the selectively deposited germanium is determined primarily by the substrate temperature and the GeCl4 concentration. The device to be fabricated in the Ge pockets is described. Author

Descriptors:

• (*INTEGRATED CIRCUITS
• *RADAR EQUIPMENT)
• PORTABLE EQUIPMENT
• GALLIUM ARSENIDES
• GERMANIUM
• EPITAXIAL GROWTH
• ETCHING
• DEPOSITION
• ELECTRICAL RESISTANCE

Subject Categories:

• Electrical and Electronic Equipment
• Active and Passive Radar Detection and Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE