Accession Number:

AD0650990

Title:

AN INVESTIGATION OF VACUUM DEPOSITED MULTILAYER THIN FILM CAPACITORS,

Descriptive Note:

Corporate Author:

JOHNS HOPKINS UNIV SILVER SPRING MD APPLIED PHYSICS LAB

Personal Author(s):

• Gordon,S. H.

Report Date:

1962-04-18

Pagination or Media Count:

17.0

Abstract:

An investigation was made of vacuum deposited multilayer thin film capacitors to reduce the area required for a given value of capacitance.

Descriptors:

• (*CAPACITORS
• FILMS)
• VACUUM APPARATUS
• VAPOR PLATING
• MICROELECTRONICS
• MANUFACTURING
• CIRCUITS
• DIELECTRIC FILMS

Subject Categories:

• Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE