Accession Number:

AD0648018

Title:

REACTIVELY SPUTTERED CERMET RESISTORS.

Descriptive Note:

Final rept. May 65-May 66,

Corporate Author:

ROME AIR DEVELOPMENT CENTER GRIFFISS AFB N Y RELIABILITY BRANCH

Personal Author(s):

Report Date:

1967-01-01

Pagination or Media Count:

33.0

Abstract:

A dual cathode sputtering technique for creating thin cermet films is described in this report. This technique was actually used to produce four types of mixtures gold-tungsten oxide, platinum-tungsten oxide, platinum tantalum oxide, and gold tantalum oxide. Various resistor parameters are presented for all of the films. However, the emphasis is on the gold tantalum mixtures which gave a zero temperature coefficient at approximately 6 to 8 thousand ohms per square sheet resistivity. A summation is presented on this work and suggestions for further efforts in this field. Author

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE