Accession Number:

AD0641338

Title:

CAPACITOR CHARACTERISTICS OF ANODIZED THIN-FILM HAFNIUM.

Descriptive Note:

Technical rept.,

Corporate Author:

ARMY ELECTRONICS COMMAND FORT MONMOUTH N J

Personal Author(s):

Report Date:

1966-09-01

Pagination or Media Count:

36.0

Abstract:

Capacitors were fabricated from anodized hafnium films previously sputtered onto glass slides. The sputtering rate was 108 Amin. Anodization was accomplished at 46 volts, the electrolyte being 0.5 N. aqueous ammonium sulphate and the anodization rate 57 AV. The counter electrode was vacuum-deposited gold. Variations in the anodic technique caused little or no improvement in capacitor characteristics. Characteristics found were K 50, capacitance 1.1 microfaradssq in, dissipation factor 1.3, TCC 200 ppmC, voltage breakdown 75 of fermation voltage, and current leakage 3.0 to 4.5 x 10 to the minus 8th power ampssq in at the knee formed at 18 V. The insulation resistance at 18 V was 2.0 to 3.0 x 10 to the 10th power ohms 1.0 to 1.5 x 10 to the 8th power ohmssq in. There are indications that the films are relatively non-polar. There is a wicking of electrolyte during the anodization process.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE