THIN FILM TECHNIQUES FOR SILICON INTEGRATED CIRCUITS.
Quarterly rept. no. 7, 1 Feb-30 Apr 66.
MOTOROLA INC PHOENIX ARIZ SEMICONDUCTOR PRODUCTS DIV
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Motor drive with speed control installed on cermet powder feed mechanism. Cermet depositions on a multiple wafer resistance uniformity and b reproducibility in a series of experiments to optimize the deposition and process parameters have been completed. One-thousand hour 200C storage tests completed on 21 canned cermet resistors. Continued plasma anodization of aluminum thin films with new substrate heater-holder installed on the system. Measurements for 0.7 pFsq mil -20 volt plasma anodized capacitors canned and prestorage were completed. The units are now on 1000 hour storage tests. The Reactive Sputtering power supply has been delivered and is now being installed. Masks for the MIC-C44 linear amplifier and the MIC-C50 gate circuit masks were completed. Circular contact Ni-Cr resistors were deposited in several geometrical configurations and evaluated for high frequency characteristics. Author
- Electrical and Electronic Equipment